Azbil Releases New Sapphire Capacitive Diaphragm Meters with MEMS Processing Technology to Improve Deposition Resistance

TOKYO-(BUSINESS WIRE)–Azbil Corporation (TOKYO:6845) announced January 25 availability of its Model V8 sapphire capacitive diaphragm sensors that use MEMS*1 processing technology to improve deposition resistance*2 on the sensor.

As part of the continued evolution of semiconductor manufacturing, front-end film deposition and etching processes now use a wider variety of gases. Depending on the process gas used, film deposits may form on the sensor diaphragm of the vacuum gauge used in these processes, causing its zero point to shift. Such a change causes film deposition and etching equipment operators to adjust the vacuum gauge more often, which interferes with production plans.

Azbil has in the past developed products to address this problem, which continues to arise with the use of new gases. In search of a better solution, Azbil completely redesigned its current sapphire capacitive diaphragm pressure gauge and released the V8 model, which has a sensor with a new structure, flow path, etc. MEMS technology is used to make the surface of the sensor chip uneven, helping a shattering film deposited on the sensor diaphragm. stress*3 it is now better balanced (also in models with an improved version of the flat sensor used in existing meters), making the diaphragm surface less likely to bend. As a result, the degree of zero point shift in the V8 model due to film deposits has been dramatically reduced to one-tenth that of the existing SPG model.

The V8S model features a control unit that is separate from the gauge head, allowing use at temperatures up to 250 °C. Such high temperature environments are often encountered in atomic layer deposition (ALD)*4 equipment due to process gas changes.


  • Higher resistance to deposition on the sensor

    With MEMS technology, the degree of zero point shift due to film deposits formed on the sensor is reduced to one-tenth that of the SPG model.

  • Resistance to temperatures up to 250 °C

    The high temperature model V8S (separate model) was added to the range in response to changes in process gases.

  • Compact size with a smaller footprint

    By more efficiently arranging the components inside the product, its volume has been reduced by 40% compared to the SPG model.

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Guided by the azbil Group’s philosophy of “human-centered automation”, Azbil aims to make a “serial” contribution to a sustainable society and ensure its own sustainable growth. Proposes solutions to manufacturing site problems that meet customer needs.

*1 Microelectromechanical systems. Various devices or systems such as sensors that include microscopic electrical and mechanical elements on a single chip.

*2 In semiconductor manufacturing, this refers to a film forming process that produces a thin film.

*3 The force generated inside a component when it receives an external force.

*4 Film deposition technology used in vacuum.

About Azbil Corporation

Azbil Corporation, formerly known as Yamatake Corporation, is a leading company in building and industrial automation, using its measurement and control technologies to provide customers with high value-added solutions to make their operations more efficient and sustainable. Founded in 1906, Azbil serves customers worldwide in a wide range of industries and aims to contribute to the safety, comfort and satisfaction of people, as well as to global environmental protection. At the end of March 2022, Azbil employed more than 10,000 people worldwide and generated ¥256 billion in revenue.

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